Showcase : centrotherm international AG
Organization Description
centrotherm is one of the leading developers and manufacturers of production equipment for various semiconductor technologies and applications, such as logic and memory devices (e.g. Flash, DRAM), power semiconductors (e.g. Si, SiC), LED, SMT, MEMS or sensor technology. It has an outstanding reputation in the field of 150 mm SiC processing.
Product Showcase with Product Description
c.ACTIVATOR High-temperature furnace for the annealing of SiC and other materials in Ar, N2 and H2 ambient. The centrotherm c.ACTIVATOR has been developed for high-temperature annealing applications in high-volume SiC device manufacturing. The unique design of the centrotherm process tube and heating system allows process temperatures up to 2000 °C.
c.OXIDATOR High-temperature furnace for SiC oxidation and Pre / Post Oxidation Annealing. The centrotherm c.OXIDATOR high-temperature oxidation furnace has been developed for the special needs of SiC oxidation but can also be used for silicon oxidation. The high-volume furnace is available in two versions (wafer sizes up to 200 mm).
c.RAPID Rapid Thermal Processing system for silicon and compound semiconductors. The stand-alone RTP system c.RAPID 200 has been especially developed for multiple process require-ments in R&D and production lines. High performance and flexibility combined with low cost of ownership make it the best choice in rapid thermal processing.