Showcase : RAITH NANOFABRICATION
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Website: https://www.tlg.sg/products/metrology-testing/filmetrics/
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Raith Nanofabrication – Raith is a leading precision technology manufacturer for nanofabrication, electron beam lithography, FIB SEM nanofabrication, nanoengineering, and reverse engineering applications. Filmetrics - offers precise measurement of pattern dimensions, film thicknesses measurement, layer-to-layer alignment, pattern placement, surface topography and electro-optical properties, and allows chip manufacturers to maintain tight control of their processes for improved device performance and yield.
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What makes Raith unique is the range of its nanofabrication products and services, covering high-end systems for productive and industrial applications right through to highly flexible solutions for budget-conscious academic research. Raith’s broad nanofabrication portfolio offers the ideal solution for all your nanofabrication challenges.
The Profilm3D® optical profilometer offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer measurement techniques.
The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.